Overview
MVD is a molecular vapor deposition (MVD) system. It is a self assembling monolayers (SAMs)-based configuration of a Savannah S200 from Cambridge Nanotech with 1 SAMs delivery port and 4 standard atomic layer deposition (ALD) lines. It is used to deposit organic SAMS layers and metal oxides on 2-D materials. The system can accommodate pieces up to an 8" wafer. Many thanks to Xiaoxing Xu, Ateeq Suria, Alex Piggott, and Felix Alfonso for their contributions to this page.
Processing Technique(s)
Capabilities and Specifications
Lab Supplied Materials
Material Thickness Range:
Process Temperature Range:
Gases
Substrate Sizes
Reactor located inside glovebox
Lab Organization, Location, and NEMO Information
Training and Maintenance
Steps to become a tool user
Become a member of nano@stanford.
Become a member of SNF.
- Study the relevant operating procedures:
Shadow labmembers who are using the MVD. Make sure to ask lots of questions until you feel familiar that you could run it yourself.
Contact the primary trainer to set up an appointment for the written quiz.
After successfully passing the written quiz, you will set up a time for the final practical in-lab session.