Characterization of metal-nitride films deposited by the Savannah ALD system
Project Type:
E241
Date:
June 2011
Areas of Interest:
ALD metal-nitride films
Processing Technique (former Function and Method):
Researchers and (Mentors):
Adair Gerke, Suhas Kumar, (J Provine), (Krishna Saraswat)
List of Important Equipment:
Presentation(s):
