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Low temperature ALD-Grown Superconducting Tunnel Contacts

Project Type: 
March 2020
Areas of Interest: 
Low temperature ALD
Processing Technique (former Function and Method): 
Researchers and (Mentors): 
Molly Anderson, Ilan Rosen (Michelle Rincon), (J Provine), (Vijay Narasimhan)
List of Important Equipment: 
Nano Nugget(s): 

Tips for deposition of very thin, low temperature Al2O3 in the Savannah in the SNF.

Both electrical and physical characterization techniques are explained for characterizing thin ALD films.