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Low temperature ALD-Grown Superconducting Tunnel Contacts

Project Type: 
E241
Date: 
March 2020
Areas of Interest: 
Low temperature ALD
Report(s): 
F19- SOP for Low-Temperature ALD of Alumina and Film Quality Characterization
W20- Characterization of Alumina and Hafnia grown by low-temperature ALD Final Report
Processing Technique (former Function and Method): 
Thermal ALD
Researchers and (Mentors): 
Molly Anderson, Ilan Rosen (Michelle Rincon), (J Provine), (Vijay Narasimhan)
List of Important Equipment: 
Savannah ALD (savannah)
Nano Nugget(s): 

SOP for Thin, low temperature ALD of Al2O3 and HfO2 with seed layer

Tips for deposition of very thin, low temperature Al2O3 in the Savannah in the SNF.

How to characterize thin ALD films

Both electrical and physical characterization techniques are explained for characterizing thin ALD films.

Presentation(s): 
Low temperature ALD-Grown Superconducting Tunnel Contacts- Fall 2019 Final Presentation