SOP for Thin, low temperature ALD of Al2O3 and HfO2 with seed layer PDF File: SOP for Thin, low temperature ALD of Al2O3 and HfO2 with seed layer This should be displaying SOP for Thin, low temperature ALD of Al2O3 and HfO2 with seed layer inline. If it's not, look to see if your browser is set to automatically download pdf files. Materials Aluminum Oxide