Characterization of Fiji ALD Film Quality and Conformality in High Aspect Ratio/Deep Etched Structures
Project Type:
E241
Date:
December 2011
Areas of Interest:
Conformality of ALD films; Al2O3, TiN and Pt
Processing Technique (former Function and Method):
Researchers and (Mentors):
Insun Park, Jooyong Sim, Young Ik Sohn, (J Provine)
List of Important Equipment:
