Project Type: 
E241
Date: 
December 2011 (all day)
Areas of Interest: 
Conformality of ALD films; Al2O3, TiN and Pt
Report: 
Characterization of Fiji ALD Film Quality and Conformality in High Aspect Ratio/Deep Etched Structures- Final Report
Processing Technique (former Function and Method): 
Atomic Layer Deposition (ALD)
Researchers and (Mentors): 
Insun Park, Jooyong Sim, Young Ik Sohn, (J Provine)
List of Important Equipment: 
Fiji 1 ALD (fiji1)
Fiji 2 ALD (fiji2)
Savannah ALD (savannah)