Thick low-temp ALD Al2O3 for Insulating Spacers
PROM Request Title:
Thick low-temp ALD Al2O3 for Insulating Spacers
PROM Request Summary:
Request for long ALD run outside of standard operating procedure.
PROM Date:
05/17/2017
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
