Corrosive Resistant ALD Coatings
Project Type:
E241
Date:
June 2011
Areas of Interest:
Corrosive resistant ALD films; Al2O3, HfO2 and ZrO2
Processing Technique (former Function and Method):
Researchers and (Mentors):
Joseph Doll, Alexandre Haemmerli, (J Provine)
List of Important Equipment:
Presentation(s):
