This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| LixAlyOz ALD | 09/03/2015 (all day) | Request to make Lithium-Aluminum-Oxide in Savannah. |
Savannah ALD (savannah), Woollam (woollam) |
Request approved. Savannah chamber will need to be sent for cleaning after processing. |
| ITO Sputtering Target in Metallica | 09/02/2015 (all day) | Request to use ITO sputtering target in Metallica. | Request approved. Recipes with O2 will require coordination of equipment modification with staff. | |
| Exnodes PROM | 08/31/2015 (all day) | Request to use cleanroom space to conduct demo of users' equipment. | Request approved. Minimum 3 hours staff time will be charged. | |
| Ferritin from Equine Spleen | 08/17/2015 (all day) | Request to use Ferritin in SNF as a catalyst for CNT growth. | First Nano carbon nanotube CVD furnace (cvd-nanotube) | Request approved. Wet processing before CNT furnace to be performed in nSiL lab outside of SNF. |
| HgCdTe/HgTe/HgCdTe quantum wells on GaAs substrate | 08/17/2015 (all day) | Request to do low temp Al2O3 deposition on new materials in Savannah. Pieces will be on carrier wafers. | Savannah ALD (savannah) | Request approved. Chamber to be coated with 200 cycles of Al2O3 at 200C after deposition. |
| Post wafer dicing pieces in lampoly | 08/13/2015 (all day) | Request to take pieces post wafer dicing (gold) into lampoly (clean). | Lam Research TCP 9400 Poly Etcher (lampoly) | Request approved only when resist is present during dicing to prevent massive amounts of particles. |
| HSQ bonding in evbond | 08/13/2015 (all day) | Bonding procedure developed with SNF staff to use HSQ in evbond. |
SVG Resist Coat Track 1 (svgcoat), Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE) |
Request approved. |
| Request to use CT-3000 Color Resist | 08/06/2015 (all day) | Request to bring new color resist into SNF. | Request approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information | |
| Backside Removal of SOI-on-LiNbO3 in PT-DSE | 07/28/2015 (all day) | Process developed to remove backside silicon on PT-DSE. | Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE) | Form submitted for archival purposes. |
| Request to deposit 75nm of Al2O3 on Savannah | 07/23/2015 (all day) | Request to exceed 50nm limit for deposition on Savannah. | Savannah ALD (savannah) | Requestor decided more cost effective process was to send out for deposition at LGA films. |