ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| HgCdTe/HgTe/HgCdTe quantum wells on GaAs substrate | 08/17/2015 | Request to do low temp Al2O3 deposition on new materials in Savannah. Pieces will be on carrier wafers. | Savannah ALD (savannah) | Request approved. Chamber to be coated with 200 cycles of Al2O3 at 200C after deposition. |
| Post wafer dicing pieces in lampoly | 08/13/2015 | Request to take pieces post wafer dicing (gold) into lampoly (clean). | Lam Research TCP 9400 Poly Etcher (lampoly) | Request approved only when resist is present during dicing to prevent massive amounts of particles. |
| HSQ bonding in evbond | 08/13/2015 | Bonding procedure developed with SNF staff to use HSQ in evbond. |
EVG Wafer Bonder (evbond), SVG Resist Coat Track 1 (svgcoat), Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE) |
Request approved. |
| Request to use CT-3000 Color Resist | 08/06/2015 | Request to bring new color resist into SNF. | Request approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information | |
| Backside Removal of SOI-on-LiNbO3 in PT-DSE | 07/28/2015 | Process developed to remove backside silicon on PT-DSE. | Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE) | Form submitted for archival purposes. |
| Request to deposit 75nm of Al2O3 on Savannah | 07/23/2015 | Request to exceed 50nm limit for deposition on Savannah. | Savannah ALD (savannah) | Requestor decided more cost effective process was to send out for deposition at LGA films. |
| Use of low-outgassing silicone glue in metal evaporation system | 07/20/2015 | Request to use Master Bond MS921-LO to make shadow masks for intlvac-evap. | Intlvac Evaporator (Intlvac_evap) | Request approved. |
| Use of CO on Fiji2 | 07/14/2015 | Request to use CO gas bottle on Fiji2 for nucleation studies. | Fiji 2 ALD (fiji2) | Request approved. |
| Request to use SR-5030L Color Photo Resist | 07/09/2015 | Request to bring new color resist into SNF. | Request approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information | |
| Request to enter material required for spin coating PVDF films in SNF. | 07/03/2015 | Request to bring new materials into the SNF in order to spin coat PVDF films. | Headway Manual Resist Spinner (headway2) | Request approved. |
