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ProM Request archive

This is an archive of requests from 2013 to 2021. New requests are not being added here.
PROM Request Title PROM Date PROM Request Summary Equipment List PROM Decision
Initial Characterization of Cyclotene XUS 35077.00 Type 02 Resin 01/07/2015 Request to use Cyclotene XUS Resin in SNF. Approved. Until refrigerator is available in the cleanroom, temporary storage offered in refrigerator in chemical store room. // Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information
Diamine (DAH) Precursor for MLD of Polymers 12/04/2014 Request for new precursor for MVD. Savannah ALD (savannah) Approved.
Constantan (0.55Cu-0.45Ni) sputtering target for Metalica 11/19/2014 Request for new Metallica target. Approved.
Contamination Study of ZnO Anneal 11/18/2014 Request to collect data to determine impact of ZnO anneal in furnaces. Savannah ALD (savannah) Approved. Data will be updated once results are back.
use of dry film photoresist (MX5015) with developer (0.75wt% potassium carbonate) and remover (EKC-162) 11/11/2014 Request to use alternate dry film photoresist and developer. Potassium carbonate handling requires specific safety precautions. Headway Manual Resist Spinner (headway2) Approved. Any changes to location or quantities need review.
PT-DSE to CLEAN contamination process flow 11/06/2014 Request to process materials in CLEAN process equipment after PT-DSE. This requires a change in contamination policy. AMAT Centurion Epitaxial System (epi2) Conditional approval. Data must be analyzed before final approval.
Request for 150nm ALD film 11/06/2014 Request to deposit 150nm Al2O3 in ALD. Fiji 3 ALD (fiji3) Rejected due to insufficient information regarding requirement for ALD vs. other deposition methods.
Polymers 575771 and 593052 use in SNF 11/06/2014 Request to use Poly(pyromellitic dianhydride-co-4,4′-oxydianiline), amic acid solution (575771) and Poly(pyromellitic dianhydride-co-4,4′-oxydianiline), amic acid solution (593052) in the SNF. Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information.
Metal CMP 11/05/2014 Request to use CMP to polish gold. Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE) Approved.
Mesitylene in SNF 11/05/2014 Request to use Mesitylene in SNF. Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information.

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