Contamination Study of Semi-Clean SiGe in LAMpoly

PROM Request Title:

PROM Request Summary:

Request to perform contamination study of Semi-Clean SiGe in LAMpoly.

PROM Date:

02/02/2015

PROM Decision:

Approved for study. Resubmission is required after data is collected. // Update 2/18/15: TiN layer deposition at Berkeley is approved due to extended Fiji1 downtime. // Update 3/31/15: Contamination data appended. Process flow is approved.

Link to PROM Request and supporting documentation:

Contamination Study of Semi-Clean SiGe in LAMpoly

Equipment List:

Lam Research TCP 9400 Poly Etcher (lampoly)

CMP GnP POLI-400L (cmp)

AMAT P5000 Etcher (p5000etch)

Fiji 1 ALD (fiji1)