ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Dichlorosilane processing on Fiji1 | 09/22/2014 | Request to use DCS precursor on Fiji1. | Fiji 1 ALD (fiji1) | Approved with modifications. Clarifications regarding DCS monitoring during processing added. |
| PS-OH use in SNF | 09/18/2014 | Request to use PS-OH polymer in SNF. | Headway Manual Resist Spinner (headway2) | Approved. |
| UV Cured adhesive use | 08/29/2014 | Request to use NOA89 or NOA75 in SNF. | Approved. | |
| Ionic Liquid on Woollam | 08/13/2014 | Request to use measure non-hazardous liquid electrolyte on Woollam. | Woollam (woollam) | Approved. Required to use a cap covered cuvette to transfer liquid across the lab. |
| PS-PMMA use in SNF | 08/12/2014 | Request to use PS-PMMA in SNF tools. | Headway Manual Resist Spinner (headway2) | Approved. |
| PGMEA use in SNF | 08/12/2014 | Request to use PGMEA in SNF tools. | Headway Manual Resist Spinner (headway2) | Approved. |
| Etching Cytop 809M in PT-MTL | 07/25/2014 | Request to etch Cytop spin on glass in PT-MTL etcher. | Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL) | Approved. PT-Ox recommended due to CHF3 availability but material is approved for PT-MTL. |
| Etching T12B SOG in Pt-Ox | 07/25/2014 | Request to etch T12B spin on glass in PT-OX etcher. | Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox) | Approved. |
| Etching T12B SOG in PT-MTL | 07/25/2014 | Request to etch T12B spin on glass in PT-MTL etcher. | Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL) | Approved. PT-Ox recommended due to CHF3 availability but material is approved for PT-MTL. |
| Etching FOx-22 in PT-Ox | 07/25/2014 | Request to etch FOx-22 spin on glass in PT-OX etcher. | Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox) | Approved. |
