This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Request for 150nm ALD film | 11/06/2014 (all day) | Request to deposit 150nm Al2O3 in ALD. | Fiji 3 ALD (fiji3) | Rejected due to insufficient information regarding requirement for ALD vs. other deposition methods. |
| Polymers 575771 and 593052 use in SNF | 11/06/2014 (all day) | Request to use Poly(pyromellitic dianhydride-co-4,4â²-oxydianiline), amic acid solution (575771) and Poly(pyromellitic dianhydride-co-4,4â²-oxydianiline), amic acid solution (593052) in the SNF. | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information. | |
| Metal CMP | 11/05/2014 (all day) | Request to use CMP to polish gold. | Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE) | Approved. |
| Mesitylene in SNF | 11/05/2014 (all day) | Request to use Mesitylene in SNF. | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information. | |
| HMDS for Cypress HX3 Lead Frame | 11/01/2014 (all day) | Request for YES oven recipe skews. | Approved. | |
| ALD film thickness 150nm | 10/31/2014 (all day) | Request to deposit 150nm of ALD film (upper limit is 50nm). | Fiji 3 ALD (fiji3) | Approved. |
| Oxalic acid in the SNF | 10/28/2014 (all day) | Request to use oxalic acid in the SNF. | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information. | |
| Nb etch in PT-Metal | 10/21/2014 (all day) | Request to use PT Metal to etch Nb. | Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL) | Approved. |
| PI2611 and PI2610 use in SNF | 10/15/2014 (all day) | Request to use PI2611 and 2610 in SNF. | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information. | |
| Polyimide MLD | 10/13/2014 (all day) | Request to use MVD to develop polyimide film deposition. |
Savannah ALD (savannah), Fiji 2 ALD (fiji2) |
Approved. |