Skip to content Skip to navigation

ProM Request archive

This is an archive of requests from 2013 to 2021. New requests are not being added here.
PROM Request Title PROM Date PROM Request Summary Equipment List PROM Decision
Request for use of HD Microsystems PI-2611 and VM-651 02/05/2014 Request to bring new chemistries in for Poly Imide processing. Approved.
Epoxy Permanent Resists from Microchem, version 174 02/04/2014 Request for use of MicroChem Epoxy Permanent Resist version 174. Headway Manual Resist Spinner (headway2) Approved. Any changes to documented request will require re-evaluation by committee.
Request for use of EPR-174 02/04/2014 Headway Manual Resist Spinner (headway2) Approved.
Use of Strontium Titanate Single Crystal substrate in CPD 01/31/2014 Inquiry to PROM committee. Approved.
Use of Filmtronics P507 SOD for Ge(Sn) epi on Si 01/23/2014 Request to bring new SOD into SNF. Headway Manual Resist Spinner (headway2) Approved.
Process flow to go from PT-DSE (contaminated) to epi2 (clean) 01/21/2014 Process flow change request to go from contaminated to clean equipment (in violation of contmaination policy). AMAT Centurion Epitaxial System (epi2) Rejected. Further follow up from requester required.
Microchem Remover PG 12/12/2013 Inquiry to store new 4L bottle of Microchem Remover PG Approved. Mahnaz provided yellow label for bottle.
MgO Substrate in Fiji2 12/12/2013 Request to use MgO substrate in Fiji2 Fiji 2 ALD (fiji2),
Woollam (woollam)
Approved.
EE342 Piezoelectric AlN/Mo stack 12/06/2013 Documentation of EE342 process No approval required. Form submitted for documentation purposes.
Potassium Dichromate (K2Cr2O7) Solution 12/04/2013 Request to bring in Potassium Dichromate (K2Cr2O7) chemistry Wet Bench Flexcorr 1 (wbflexcorr-1) Approved.

Pages