ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Request for use of HD Microsystems PI-2611 and VM-651 | 02/05/2014 | Request to bring new chemistries in for Poly Imide processing. | Approved. | |
| Epoxy Permanent Resists from Microchem, version 174 | 02/04/2014 | Request for use of MicroChem Epoxy Permanent Resist version 174. | Headway Manual Resist Spinner (headway2) | Approved. Any changes to documented request will require re-evaluation by committee. |
| Request for use of EPR-174 | 02/04/2014 | Headway Manual Resist Spinner (headway2) | Approved. | |
| Use of Strontium Titanate Single Crystal substrate in CPD | 01/31/2014 | Inquiry to PROM committee. | Approved. | |
| Use of Filmtronics P507 SOD for Ge(Sn) epi on Si | 01/23/2014 | Request to bring new SOD into SNF. | Headway Manual Resist Spinner (headway2) | Approved. |
| Process flow to go from PT-DSE (contaminated) to epi2 (clean) | 01/21/2014 | Process flow change request to go from contaminated to clean equipment (in violation of contmaination policy). | AMAT Centurion Epitaxial System (epi2) | Rejected. Further follow up from requester required. |
| Microchem Remover PG | 12/12/2013 | Inquiry to store new 4L bottle of Microchem Remover PG | Approved. Mahnaz provided yellow label for bottle. | |
| MgO Substrate in Fiji2 | 12/12/2013 | Request to use MgO substrate in Fiji2 |
Fiji 2 ALD (fiji2), Woollam (woollam) |
Approved. |
| EE342 Piezoelectric AlN/Mo stack | 12/06/2013 | Documentation of EE342 process | No approval required. Form submitted for documentation purposes. | |
| Potassium Dichromate (K2Cr2O7) Solution | 12/04/2013 | Request to bring in Potassium Dichromate (K2Cr2O7) chemistry | Wet Bench Flexcorr 1 (wbflexcorr-1) | Approved. |
