Request for 150nm ALD film
PROM Request Title:
Request for 150nm ALD film
PROM Request Summary:
Request to deposit 150nm Al2O3 in ALD.
PROM Date:
11/06/2014
PROM Decision:
Rejected due to insufficient information regarding requirement for ALD vs. other deposition methods.
Link to PROM Request and supporting documentation:
Equipment List:
