Skip to content Skip to navigation

SNF and ExFab Characterization and Testing Equipment

The SNF and ExFab facilities provide characterization equipment that is used for fabrication process development and analysis as well as some electrical device characterization.

Characterization and Testing Equipment Summary

Processing Techniques Equipment Cleanliness Substrate Size Notes
Characterization micromanipulator6000 IV-CV probe station (micromanipulator6000) "All"
Ellipsometry Woollam (woollam) "All"
Microscopy Keyence Digital Microscope VHX-6000 (keyence) "All"
Reflectometry Nanospec 210XP (nanospec2) "All"

Manual Film Thickness Measurement. Single or dual layer transparent films > 300 Å
Optical Profilometer, Interferometry Sensofar S-neox (s-neox) "All"

non contact 3D optical profiling
Step Profile Profilometer Alphastep 500 (alphastep) Flexible

500Å to 300µm
Sheet Resistance Measurement Prometrix Resistivity Mapping System (prometrix) "All"

3 Probe Heads for different cleanliness groups.
Film Stress Measurement Flexus 2320 Stress Tester (stresstest) "All"
Atomic Force Microscopy (AFM) Asylum AFM (afm-asylum) Flexible
Atomic Force Microscopy (AFM) AFM Bruker Dimension ICON ()
Dynamic Light Scattering Malvern Dynamic Light Scattering (DLS) Zetasizer (malvern-dls) Flexible
Characterization Jasco UV-Vis-NIR (jasco-uv-vis-nir) Flexible
Characterization CytoViva HSI (cytoviva) Flexible
Reflectometry Nanospec 3 (nanospec3) "All"
Sheet Resistance Measurement LEI1500 Contactless Sheet Resistance Mapping (eddycurrent) "All"
Characterization SPF Measurement Bench ()
Reflectometry Reflectance Spectrometer Filmetrics F40 (filmetrics) "All"
Sheet Resistance Measurement, Hall measurement Lakeshore Hall Measurement System (LakeshoreHall) "All"
Scanning Electron Microscopy (SEM) SEM -Zeiss Merlin (sem-merlin) "All"
Step Profile Profilometer AlphaStep D-300 (alphastep2) Flexible
Last modified: 30 Apr 2020