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Scanning Electron Microscopy (SEM)

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Scanning Electron Microscopy (SEM)	SEM -Zeiss Merlin sem-merlin	Mid-Range SEM for inspection of wafer defects, etch depths, and lithography overlay.	All	SNF Exfab Paul G Allen 104 Stinson
Scanning Electron Microscopy (SEM)	SEM: FEI Nova NanoSEM 450	The FEI Nova NanoSEM will be decommissioned in the week of February 3rd 2025	All	SNSF NPC Cleanroom Spilker suite006

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Material Thickness Range	Substrate Size	Maximum Load (number of wafers)	Notes
Scanning Electron Microscopy (SEM)	SEM -Zeiss Merlin sem-merlin	All	0.00 mm - 35.00 mm	Pieces 2" 3" 4" 6" Disks	one
Scanning Electron Microscopy (SEM)	SEM: FEI Nova NanoSEM 450	All		Pieces 2" 3" 4"	one	The FEI Nova NanoSEM will be decommissioned in the week of February 3rd 2025