Overview
The LEI1500 Eddy current system measures sheet conductance (mhos/square) as a proportional DC voltage, before and after moving the sample under the sensing coil with magnetic field. This allows contactless measurement of Sheet Resistance by Eddy current. It measures bulk samples or films of sheet resistance from below 0.1ohm/sqr to above 3000ohm/sqr on high resistivity substrates within 900um thickness. Sample size up to 8” wafers, Sensor Transducer Size 14 mm diameter (spot size)
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Process Temperature Range:
Characterization Specifications
Sample Size Limits:
8 in wafer
Resolution Notes:
Sensor Transducer Size is 14 mm diameter
Substrate Type
Substrate Sizes
Maximum Load:
1 wafer(2" to 8")
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
NEMO ID:
eddycurrent
Training and Maintenance
Lab Facility:
Training Charges:
1.00 hours
Primary Trainer:
Steps to become a tool user
Become a member of nano@stanford.
Become a member of SNF.
- Study the relevant operating procedures:
- Contact the primary trainer: Swaroop Kommera