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LEI1500 Contactless Sheet Resistance Mapping (eddycurrent)


The LEI1500 Eddy current system measures sheet conductance (mhos/square) as a proportional DC voltage, before and after moving the sample under the sensing coil with magnetic field. This allows contactless measurement of Sheet Resistance by Eddy current. It measures bulk samples or films of sheet resistance from below 0.1ohm/sqr to above 3000ohm/sqr on high resistivity substrates within 900um thickness. Sample size up to 8” wafers, Sensor Transducer Size 14 mm diameter (spot size)


Capabilities and Specifications

Maximum Load: 
1 wafer(2" to 8")

Lab Organization, Location, and NEMO Information

Lab Organization: 
NEMO Area: 
nSiL: 151 Ocean

Training and Maintenance

Lab Facility: 
Training Charges: 
1.00 hours
Primary Trainer: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Contact the primary trainer: Swaroop Kommera