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LEI1500 Contactless Sheet Resistance Mapping (eddycurrent)

Overview

The LEI1500 Eddy current system measures sheet conductance (mhos/square) as a proportional DC voltage, before and after moving the sample under the sensing coil with magnetic field. This allows contactless measurement of Sheet Resistance by Eddy current. It measures bulk samples or films of sheet resistance from below 0.1ohm/sqr to above 3000ohm/sqr on high resistivity substrates within 900um thickness. Sample size up to 8” wafers, Sensor Transducer Size 14 mm diameter (spot size)

Cleanliness: 
All

Processing Technique(s)

Capabilities and Specifications

Maximum Load: 
1 wafer(2" to 8")

Lab Organization, Location, and NEMO Information

Lab Organization: 
(SNF Exfab)
Location: 
SNF Exfab Paul G Allen 151 Ocean
NEMO Area: 
nSiL: 151 Ocean
NEMO ID: 
eddycurrent

Training and Maintenance

Lab Facility: 
SNF Exfab
Training Charges: 
1.00 hours
Primary Trainer: 
Swaroop Kommera

Steps to become a tool user

  1. Become a member of SNF.
  1. Study the relevant operating procedures:
  2. Contact the primary trainer: Swaroop Kommera