Lampoly HBr/Cl2/O2 etching of silicon on lithium niobiate
PROM Request Title:
Lampoly HBr/Cl2/O2 etching of silicon on lithium niobiate
PROM Request Summary:
Request to introduce lithium niobiate substrate into SNF etchers.
PROM Date:
02/07/2015
PROM Decision:
Pending contamination study documentation.
Link to PROM Request and supporting documentation:
Equipment List:
