ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Request to spin coat birnessite | 06/14/2016 | Request to spin coat MnO2 slurry in CMP room spin coater. | PDMS Spin Coater (spincoat-g3p8) | Approved. |
| Request for new Cu Etchant | 06/13/2016 | Request to use new copper etchant. | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details. | |
| Request to use Dynaloy Dynastrip | 05/06/2016 | Request to use Dynaloy Dynasrip in the SNF. | Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE) | Approved for use in the solvent bench. Separate waste collection and tagging required. |
| Request to use Envirotex Lite Resin in nSiL | 05/04/2016 | Request to spin coat Envirotex Lite Resin in nSiL Spin coater. | Approved. | |
| Request to run Fiji3 as Semiclean | 04/27/2016 | VPD-ICPMS Data collection done to demonstrate procedure will allow Fiji3 to operate as semiclean. | Fiji 3 ALD (fiji3) | Data collected and reviewed by committee. Approved. |
| Request to use DL1000C Polyimide | 04/25/2016 | Request to use DL1000C Polyimide in SNF | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details. | |
| ITO Etching in Ox35 | 04/08/2016 | Request to change contamination level and use Ox35 for ITO etching. | Oxford III-V etcher (Ox-35) | Approved with ongoing data collection. |
| ALD Deposition on Carbon Felts | 04/01/2016 | Request to use Fiji2 for Carbon Felt substrate. | Fiji 2 ALD (fiji2) | Approved. |
| Bringing Transene TE-100 into SNF | 03/29/2016 | Request to bring new chemical into SNF for ITO etch. | Wet Bench Flexcorr 1 (wbflexcorr-1) | Approved. Waste must be collected and tagged for disposal. |
| Request to use Zeocoat ES2110-10 | 03/21/2016 | Request to use Zeocoat ES2110-10 in SNF. | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details. |
