This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Request for Cr2O3 target in AJA-Evap | 07/26/2016 (all day) | User to bring in own target for Cr2O3 deposition in AJA-Evap. |
AJA Evaporator (aja-evap), SVG Resist Coat Track 1 (svgcoat), Karl Suss MA-6 Contact Aligner (karlsuss) |
Approved. SNF Staff will take proper precautions during chamber clean to avoid inhalation of particles. |
| Request to add new module (SThM) to Veeco AFM | 07/20/2016 (all day) | Installation and management of new module for existing Veeco AFM. New thermal scanning capability will be available to any labmember. | Approved. | |
| Request to use DPI-3000 Polyimide | 07/19/2016 (all day) | Request to use DPI-3000 Polyimide in the SNF. | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details. | |
| Request to move transfer station into nSiL glovebox | 06/29/2016 (all day) | Transfer station will be available for shared use. | Approved. | |
| Request to spin coat birnessite | 06/14/2016 (all day) | Request to spin coat MnO2 slurry in CMP room spin coater. | PDMS Spin Coater (spincoat-g3p8) | Approved. |
| Request for new Cu Etchant | 06/13/2016 (all day) | Request to use new copper etchant. | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details. | |
| Request to use Dynaloy Dynastrip | 05/06/2016 (all day) | Request to use Dynaloy Dynasrip in the SNF. | Plasma Therm Versaline LL ICP Deep Silicon Etcher (PT-DSE) | Approved for use in the solvent bench. Separate waste collection and tagging required. |
| Request to use Envirotex Lite Resin in nSiL | 05/04/2016 (all day) | Request to spin coat Envirotex Lite Resin in nSiL Spin coater. | Approved. | |
| Request to run Fiji3 as Semiclean | 04/27/2016 (all day) | VPD-ICPMS Data collection done to demonstrate procedure will allow Fiji3 to operate as semiclean. | Fiji 3 ALD (fiji3) | Data collected and reviewed by committee. Approved. |
| Request to use DL1000C Polyimide | 04/25/2016 (all day) | Request to use DL1000C Polyimide in SNF | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details. |