ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Sinter Au Nanoparticles on Nanoscribe | 08/02/2017 | Use the nanoscribe to sinter gold nanoparticles. | Nanoscribe Photonics GT (nanoscribe) | Request approved. |
| Metal Assisted Chemical Etch | 08/01/2017 | Etch Ti-Au on Silicon using HF, H2O2 and EthOH on wbflexcorr and wb-solv. | Wet Bench Flexcorr 1 (wbflexcorr-1) | Request approved. |
| Glutaraldehyde functionalization of PDMS | 07/23/2017 | Use Glutaraldehyde in nSiL. SOP is provided. | Request approved. | |
| Spin Coating and Evaporating Metal with Phenolic Resin | 07/05/2017 | Bring new resin into SNF. | Lesker Sputter (lesker-sputter) | Request approved for process in the new wetbench in ExFab. |
| HBr/Cl2 etching AlN in the Lampoly | 06/26/2017 | Non-standard contamination level etching in Lampoly. | Lam Research TCP 9400 Poly Etcher (lampoly) | Request approved. |
| Strontium Aluminate Use | 06/13/2017 | Proposed process for use of strontium aluminate. | Request approved. Please see process staff for details. | |
| A-061m Cu Etchant | 06/13/2017 | New chemistry for use in SNF. | Request approved. Please see process staff for details. | |
| Request to use Zeocoat CP1010-14 | 06/13/2017 | Proposed process for use of Zeocoat CP1010-14. | Request approved. Please see process staff for details. | |
| Hydrogen Anneal of Si Wafer after PT-DSE | 05/24/2017 | Request to hydrogen anneal contaminated wafers in epi furnace. | AMAT Centurion Epitaxial System (epi2) | Request approved to try H2 anneal in graphene furnace. Data collection showed graphene furnace is not viable option. |
| Request to use Lampoly to etch Si deposited on ALD oxide/metal | 05/23/2017 | Etch non-standard semiclean films in clean Lampoly etcher. | Lam Research TCP 9400 Poly Etcher (lampoly) | Request approved. |
