This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Use of sol gel inks in Optomec | 10/05/2017 (all day) | Proposal to use solvent based inks in Optomoec printer. | Optomec Printer (optomec-printer) | Request rejected due to safety concerns. |
| PT-MTL use for semiclean etch | 09/26/2017 (all day) | Use of contaminated PT-MTL tool for semiclean Al etch. | Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL) | Request approved. |
| Coating BPSG and PSG on InAs or GaAs | 09/25/2017 (all day) | Proposed process flow and precautions for processing these materials. | Request approved. Please see process staff for details. | |
| Nanodiamond Seeding | 08/17/2017 (all day) | Proposed process flow for nanodiamond seeding. | Request approved. Please see process staff for details. | |
| Sinter Au Nanoparticles on Nanoscribe | 08/02/2017 (all day) | Use the nanoscribe to sinter gold nanoparticles. | Nanoscribe Photonics GT (nanoscribe) | Request approved. |
| Metal Assisted Chemical Etch | 08/01/2017 (all day) | Etch Ti-Au on Silicon using HF, H2O2 and EthOH on wbflexcorr and wb-solv. | Wet Bench Flexcorr 1 (wbflexcorr-1) | Request approved. |
| Glutaraldehyde functionalization of PDMS | 07/23/2017 (all day) | Use Glutaraldehyde in nSiL. SOP is provided. | Request approved. | |
| Spin Coating and Evaporating Metal with Phenolic Resin | 07/05/2017 (all day) | Bring new resin into SNF. | Lesker Sputter (lesker-sputter) | Request approved for process in the new wetbench in ExFab. |
| HBr/Cl2 etching AlN in the Lampoly | 06/26/2017 (all day) | Non-standard contamination level etching in Lampoly. | Lam Research TCP 9400 Poly Etcher (lampoly) | Request approved. |
| A-061m Cu Etchant | 06/13/2017 (all day) | New chemistry for use in SNF. | Request approved. Please see process staff for details. |