ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Use of Chlorosilane in Mavericks | 08/15/2018 | Use of Chlorosilane for PDMS functionalization in Room 155. | Request approved. | |
| Ultrasol 3EX Slurry | 08/13/2018 | Use of Ultrasol 3EX Slurry in the CMP. | Request approved. Please see process staff for details. | |
| Use of ATX2020SPe as spin on dielectric | 07/28/2018 | Use of ATX2020SPe as spin on dielectric in multiple SNF tools | Request approved. Please see process staff for details. | |
| 3M Novec 73DE for Epoxy Bonding | 07/10/2018 | Use of 3M Novec 73DE as a substitute for TCE for cleaning. | Request approved. Please see process staff for details. | |
| Shinetsu SINR-DF3570 dry film negative photoresist | 06/25/2018 | Use of Shinetsu dry film photoresist is approved for use with new incoming laminator that will reside in Stinson. | Request approved. Please see process staff for details. | |
| Use of HFE7100 in Stinson | 06/25/2018 | Use of fluorinated chemistry for low surface tension rinse step to reduce damage to Nanscribe printed devices. | Nanoscribe Photonics GT (nanoscribe) | Request approved. Separated waste collection required. |
| Processing of wafers with embedded Tungsten alignment marks in the clean equipment group | 06/19/2018 | Using clean etchers to process wafers with non-clean materials. | Lam Research TCP 9400 Poly Etcher (lampoly) | Request approved. Data appended. |
| Water 18O for use in Savannah ALD | 05/31/2018 | Add 18O water to Savannah for ALD | Savannah ALD (savannah) | Request approved. |
| CO in Fiji2 Revival | 05/29/2018 | Use of CO in Fiji2 and special processing requirements documentation. Revival of previous request that was successful. | Fiji 2 ALD (fiji2) | Request approved. |
| Creative Materials conductive inks: EXP 2649-76, 125-19FS, 118-41 | 05/29/2018 | Request to use commercial conductive inks on Voltera | Voltera (voltera) | Request approved pending SOP submission. |
