ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Deposition of thermal Nitride in ThermcoNitride1 on pieces of Diamond, Silicon Carbide | 01/30/2018 | Use of ThermcoNitride for non-standard substrates. | Request approved. | |
| Hydrogel-based capacitive pH sensors | 01/18/2018 | Proposed protocol and chemical usage to create hydrogel capacitors in SNF. |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss) |
Request approved. |
| ZnO recipe modifications for Savannah | 01/16/2018 | Recipe modifications proposed for Savannah run. | Request approved. Please see process staff for details. | |
| Spinning and Etching CYTOP | 01/11/2018 | Spinning and etching of CYTOP in SNF. | Request approved. Please see process staff for details. | |
| Chemicals for use with the Micromist Coater | 12/05/2017 | Request to use Creative Chemicals 122-06 and B119-44 in Micromist. | Request approved. | |
| KMPR 1000 | 12/04/2017 | Request to use KMPR 1000 in Headway. | Headway Manual Resist Spinner (headway2) | Request approved. |
| Water Soluble Solder Mask in ExFab | 11/28/2017 | Request to use water soluble solder mask as water soluble release layer in ExFab. | Request approved. | |
| Angled Etching of Silicon in AMT Etcher with Aluminum Mesh | 11/17/2017 | Request to use Aluminum mesh in AMT etcher to develop angled etch recipe. | Fiji 1 ALD (fiji1) | Request approved. |
| Angled Etching of SOI in Lampoly with Anodized Aluminum Sheath Plate | 11/17/2017 | Request to use Anodized Aluminum sheath plate in Lampoly. |
Fiji 1 ALD (fiji1), Lam Research TCP 9400 Poly Etcher (lampoly) |
Request approved. |
| Request for GOPTS and DBSA on Optomec | 11/13/2017 | Request to use GOPTS and DBSA on Optomec. | Optomec Printer (optomec-printer) | Request rejected due to safety concerns. |
