This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| mr-DWL use and non-standard substrates for Heidelberg | 03/13/2018 (all day) | Use of mr-DWL with non-standard substrates for Heidelberg. | Request approved. Please see process staff for details. | |
| Spin-coat Linear poly(phthalaldehydes) (PPAs) diluted in Anisole | 03/09/2018 (all day) | Use of PPA in the labs. | Request approved. Please see process staff for details. | |
| Proposal to use commercial Inkjet Inks in Dimatix | 02/09/2018 (all day) | Use of a variety of Metalon and and Methode Electronics Inkjet inks in Dimatix. | Request rejected due to safety concerns. | |
| Nickel and Copper Etchants, Al2O3 etchant and Fe2O3 etchant | 02/05/2018 (all day) | Proposal to bring in Transene chemistries for etching in the SNF. | Wet Bench Flexcorr 1 (wbflexcorr-1) | Request approved. |
| Deposition of thermal Nitride in ThermcoNitride1 on pieces of Diamond, Silicon Carbide | 01/30/2018 (all day) | Use of ThermcoNitride for non-standard substrates. | Request approved. | |
| Hydrogel-based capacitive pH sensors | 01/18/2018 (all day) | Proposed protocol and chemical usage to create hydrogel capacitors in SNF. |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss) |
Request approved. |
| ZnO recipe modifications for Savannah | 01/16/2018 (all day) | Recipe modifications proposed for Savannah run. | Request approved. Please see process staff for details. | |
| Spinning and Etching CYTOP | 01/11/2018 (all day) | Spinning and etching of CYTOP in SNF. | Request approved. Please see process staff for details. | |
| Chemicals for use with the Micromist Coater | 12/05/2017 (all day) | Request to use Creative Chemicals 122-06 and B119-44 in Micromist. | Request approved. | |
| KMPR 1000 | 12/04/2017 (all day) | Request to use KMPR 1000 in Headway. | Headway Manual Resist Spinner (headway2) | Request approved. |