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ProM Request archive

This is an archive of requests from 2013 to 2021. New requests are not being added here.
PROM Request Title PROM Date PROM Request Summary Equipment List PROM Decision
Use of Liquid Crystalline Photoresist in Nanoscribe 12/05/2018 Request for new photoresist to be used in Nanoscribe. Woollam (woollam),
Nanoscribe Photonics GT (nanoscribe) 		Request approved.
Use of MDCK cells in CPD 11/29/2018 Request to bring in biosafety level 1 cells into SNF to use in the Critical Point Dryer. Critical Point Dryer Tousimis Automegasamdri-936 (cpd) Request approved.
Low Temp SiGe depositon on PI in Thermcopoly2 11/13/2018 Request to put Polyimide in Thermcopoly2. Request approved. Please see process staff for details.
DC-136 Use in Micromist Coater 11/13/2018 Request to bring in new polymer chemistry for use with micromist. Request approved. Please see process staff for details.
ZnO film development on MVD 11/06/2018 Request to use MVD and ozone capability to develop ZnO recipe. Request approved. Please see process staff for details.
Recovery Procedure for Gasonics after Gold Contaminated wafer was processed. 11/05/2018 Documented here for staff reference- accidentally processed gold contaminated wafer was processed through clean gasonics tool. Ask staff to see google drive for details.
Aqueous Carbon Black Ink for Dimatix 11/05/2018 Request to use JR-700HV Resistive Ink in Dimatix printer Request approved. Please see process staff for details.
Procedure for use of diced wafers in Drytek2 11/05/2018 Procedure to put diced wafers into Clean etcher Epilog Fusion M2 Laser Cutter (lasercutter),
SNSF Flipscribe 		Request approved.
Etch of LiNb in PT-MTL 10/30/2018 Safely processing LiNb through PT-MTL etcher Plasma Therm Versaline LL ICP Metal Etcher (PT-MTL) Request approved.
Water_IPA mixture storage and use 10/26/2018 Storage and use of water IPA mixture in SNF. Request approved.

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