ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Use of LOL1000 in SNF | 05/30/2019 | Bring new lift off resist into SNF. | Request approved. Please see process staff for details. | |
| Request to use negative photoresist photoresist âNR9-3000PYâ in SNF | 05/30/2019 | Bring new negative photoresist into SNF. |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss), Wet Bench Miscellaneous (wbmiscres) |
Approved. |
| Aqua Regia etch of Pt in SNF | 05/22/2019 | Addresses safety concerns and details of processing required for etch. Each etch will require PROM committee notification. | Approved for this use only. Please see process staff for details | |
| Use of EKC 640 in SNF | 05/22/2019 | Request to try new chemistry in SNF tools. | Request approved. Please see process staff for details. | |
| Lampoly Etch of Si on Si/SiO2/Metal/Glass Substrates | 04/28/2019 | Request for processing of metal containing wafers on semiclean lampoly tool. | Lam Research TCP 9400 Poly Etcher (lampoly) | Approved. |
| Use of InP Quantum Dots and Developer | 04/25/2019 | Request for processing of new InP Quantum Dot material and the associated developer. | Request approved. Please see process staff for details. | |
| Processing of DNA films in SNF | 04/17/2019 | DNA films (made elsewhere) to be used in SNF equipment. | Request approved. Please see process staff for details. | |
| Custom CMP pad for SiC polishing | 04/15/2019 | Request to test new pad material for CMP in order to enable silicon carbide CMP. | CMP GnP POLI-400L (cmp) | Approved. |
| EIM-TFSI/p(VDF-HFP) Ion gel processing | 04/11/2019 | Introduction of new gel material (made elsewhere) into SNF process equipment for patterning and deposition. |
AJA Evaporator (aja-evap), SVG Resist Coat Track 1 (svgcoat), Heidelberg MLA 150 (heidelberg) |
Approved. |
| Use and Storage of Copper Electroplating Solution in Room 155 | 04/10/2019 | Copper electroplating to be done in Fumehood1 in ExFab Room 155. | Fumehood 1 (fumehood1) | Approved. |
