This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Poly(pentafluorostyrene) spin coating in SNF | 06/06/2019 (all day) | Bring in new chemistry to use with SNF spin coating. |
Headway Manual Resist Spinner (headway2), Profilometer Alphastep 500 (alphastep) |
Approved. |
| Poly(4-tert-butylstyrene) spin coating in SNF | 06/06/2019 (all day) | Bring in new chemistry to use with SNF spin coating. |
Headway Manual Resist Spinner (headway2), Profilometer Alphastep 500 (alphastep) |
Approved. |
| Poly(4-chlorostyrene) spin coating in SNF | 06/06/2019 (all day) | Bring in new chemistry to use with SNF spin coating. |
Headway Manual Resist Spinner (headway2), Profilometer Alphastep 500 (alphastep) |
Approved. |
| Poly(4-hydroxystyrene) spin coating in SNF | 06/06/2019 (all day) | Bring in new chemistry to use with SNF spin coating. |
Headway Manual Resist Spinner (headway2), Profilometer Alphastep 500 (alphastep) |
Approved |
| Use of LOL1000 in SNF | 05/30/2019 (all day) | Bring new lift off resist into SNF. | Request approved. Please see process staff for details. | |
| Request to use negative photoresist photoresist âNR9-3000PYâ in SNF | 05/30/2019 (all day) | Bring new negative photoresist into SNF. |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss), Wet Bench Miscellaneous (wbmiscres) |
Approved. |
| Use of EKC 640 in SNF | 05/22/2019 (all day) | Request to try new chemistry in SNF tools. | Request approved. Please see process staff for details. | |
| Aqua Regia etch of Pt in SNF | 05/22/2019 (all day) | Addresses safety concerns and details of processing required for etch. Each etch will require PROM committee notification. | Approved for this use only. Please see process staff for details | |
| Lampoly Etch of Si on Si/SiO2/Metal/Glass Substrates | 04/28/2019 (all day) | Request for processing of metal containing wafers on semiclean lampoly tool. | Lam Research TCP 9400 Poly Etcher (lampoly) | Approved. |
| Use of InP Quantum Dots and Developer | 04/25/2019 (all day) | Request for processing of new InP Quantum Dot material and the associated developer. | Request approved. Please see process staff for details. |