ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| 20200207 A. Piazza- HFE7100 for use in wbflex-solv | 02/07/2020 |
Request to bring in new chemistry for use with nanoscribe resists |
Wet Bench Flexible Solvents 1 (wbflexsolv-1) | Approved. |
| Use of RTV-615 in Mavericks 155 | 02/07/2020 | Request to bring in new chemistry for use in 155. | Request approved. Please see process staff for details. | |
| HFE7100 for use in wbflex-solv | 02/07/2020 | Request to bring in new chemistry for use with nanoscribe resists | Approved. | |
| Bring in, store, and process Si wafers from Rogue Valley Microdevices | 02/05/2020 | Request to bring in wafers from a new vendor. |
Wet Bench Flexible Solvents (wbflexsolv), Wet Bench Flexcorr 1 (wbflexcorr-1), Wet Bench Clean_res-piranha (wbclean_res-piranha) |
Requestor developed process flow with no clean equipment required so PROM approval not needed. Requst is archived for future reference. |
| BiSbTe etch in Ox-35 | 02/03/2020 | Contamination evaluation plan documented to introduce Bi into Ox-35 etcher. | Oxford III-V etcher (Ox-35) | PROM Request is approved with no special requirements around processing. BiSbTe does contaminate the etch chamber, but contaminants can be removed with the cleaning procedures documented. All users of the Ox-35 who will go to the MOCVD equipment a... |
| Request to use PVA in SNF | 01/31/2020 | Request to bring PVA for use in SNF tools. | Request approved. Please see process staff for details. | |
| Request to use SU-8 | 01/15/2020 | Request to bring in SU-8 (not stocked by SNF). | Request approved. Please see process staff for details. | |
| Negative Resist AZ nLOF2035 in SNF | 01/09/2020 | Request to bring new resist in to SNF. | Request approved. Please see process staff for details. | |
| AlCuZr target for Lesker | 01/07/2020 | Request to bring new target in to use in Lesker. | Lesker Sputter (lesker-sputter) | Approved. |
| Depositions on V-VI Materials in Fiji3 | 01/06/2020 | Request to use non-standard materials in Fiji3. |
Fiji 3 ALD (fiji3), micromanipulator6000 IV-CV probe station (micromanipulator6000), Lakeshore Hall Measurement System (LakeshoreHall) |
Request withdrawn due to shift in project focus. Archived here for potential future re-engagement. |
