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20200207 A. Piazza- HFE7100 for use in wbflex-solv

PROM Request Title: 
20200207 A. Piazza- HFE7100 for use in wbflex-solv
PROM Request Summary: 

Request to bring in new chemistry for use with nanoscribe resists

PROM Date: 
02/07/2020
PROM Decision: 
Approved.
Link to PROM Request and supporting documentation: 
20200207 A. Piazza- HFE7100 for use in wbflex-solv
Equipment List: 
Wet Bench Flexible Solvents 1 (wbflexsolv-1)