This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Request to use KMPR 1025 resist on Heidelberg | 10/09/2019 (all day) | Detailed procedure identified to allow KMPR 1025 resist on the Heidelberg. |
Heidelberg MLA 150 - 2 (heidelberg2), Headway Manual Resist Spinner (headway2), SVG Resist Coat Track 1 (svgcoat) |
Approved. |
| Request to cure Zeocoat CP1010-14 in BlueM oven | 10/08/2019 (all day) | Process modification to allow processing in Blue M oven vs white oven. | Oven BlueM 200°C to 430°C (bluem) | Request approved. Please see process staff for details. |
| Introduction of EBR PG Wash Bottle for litho solvent bench | 08/20/2019 (all day) | Documenting new chemistry that will be stocked by SNF. |
Laurell Manual Resist Spinner (laurell-R), Wet Bench Solvent Lithography (lithosolv), Headway Manual Resist Spinner (headway2) |
Approved. |
| Request for Bi-Sb-Te dry etch Ox-35 using Methane-H2 | 08/13/2019 (all day) | Technical concerns discussed and contamination evaluation plans are documented. | Oxford III-V etcher (Ox-35) | Dropped by requestor. Please see process staff for details. |
| Characterization of Powders Using Keyence Microscope | 08/06/2019 (all day) | Request to bring powders that are NOT loose, but mounted to tape into the clean space to characterize using the Keyence. | Keyence Digital Microscope VHX-6000 (keyence) | Approved. |
| Microfabrication Materials Request for Mesh Electronics | 07/31/2019 (all day) | Move SU-8 Process from SNSF to SNF equipment. |
Headway Manual Resist Spinner (headway2), Heidelberg MLA 150 (heidelberg) |
Approved. |
| Introduction of HD4110 Polyimide photoresist in SNF/ExFab | 07/29/2019 (all day) | Bring in new chemistry to use with SNF and ExFab spin coating and exposure tools. |
Headway Manual Resist Spinner (headway2), Karl Suss MA-6 Contact Aligner (karlsuss), Heidelberg MLA 150 - 2 (heidelberg2) |
Approved. |
| Use of InP and ZnS Quantum Dots in Toluene in laurell-g | 07/25/2019 (all day) | Documenting chemicals and safety procedures. | Laurell Manual Resist Spinner (laurell-R) | Request approved. Please see process staff for details. |
| Use of TFB and m-xylene in laurell-g | 07/22/2019 (all day) | Documenting safety procedures for use of xylene in laurell-g coater. | Laurell Manual Resist Spinner (laurell-R) | Request approved. Please see process staff for details. |
| Use of NuSIL MED 6010 and MED 6015 in ExFab | 06/10/2019 (all day) | Use NuSIL MED 6010 and MED 6015 with the PDMS processing stations. | Wet Bench Miscellaneous (wbmiscres) | Approved. |