Request to use KMPR 1025 resist on Heidelberg

PROM Request Title:

Request to use KMPR 1025 resist on Heidelberg

PROM Request Summary:

Detailed procedure identified to allow KMPR 1025 resist on the Heidelberg.

PROM Date:

10/09/2019 (all day)

PROM Decision:

Approved.

Link to PROM Request and supporting documentation:

Request to use KMPR 1025 resist on Heidelberg

Equipment List:

Heidelberg MLA 150 - 2 (heidelberg2)

Headway Manual Resist Spinner (headway2)

SVG Resist Coat Track 1 (svgcoat)

SVG Develop Track 1 (svgdev)