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Cleaning Sapphire Wafer in wbclean 1 and 2

PROM Request Title: 
Cleaning Sapphire Wafer in wbclean 1 and 2
PROM Request Summary: 
Request to put non-traditional material, new sapphire wafers in wbclean 1 and 2.
PROM Date: 
12/13/2018
PROM Decision: 
Request approved.
Link to PROM Request and supporting documentation: 
Cleaning Sapphire Wafer in wbclean 1 and 2
Equipment List: 
Wet Bench Clean 1 (wbclean-1)
Wet Bench Clean 2 (wbclean-2)