Request to use Lampoly to etch Si deposited on ALD oxide/metal
PROM Request Title:
Request to use Lampoly to etch Si deposited on ALD oxide/metal
PROM Request Summary:
Etch non-standard semiclean films in clean Lampoly etcher.
PROM Date:
05/23/2017
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
