ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| NeverWet Hydrophobic Coating for use in nSiL | 10/05/2016 | NeverWet Hydrophobic Coating to be used in nSiL lab. SOP generated. | PDMS Spin Coater (spincoat-g3p8) | Approved. |
| Spin coating of ladder polymer on silicon chips | 09/13/2016 | Polymer synthesized in Prof. Xia's group (Chemistry) to be spin coated in SNF. | Approved for spin coater in CMP room. | |
| Use of Cr(OH)3 in SNF | 09/02/2016 | Use of Cr(OH)3 slurry in Laurell-G. |
SVG Resist Coat Track 1 (svgcoat), Karl Suss MA-6 Contact Aligner (karlsuss), SVG Develop Track 1 (svgdev), Laurell-G |
Approved. |
| UHV Al sputtering for processing in SNF | 08/19/2016 | Documenting processing for clean Al deposition in post-Gryphon SNF tool era. | Tylanfga Forming Gas Anneal Furnace (tylanfga) | Approved. |
| Evaluation of Fiji Plasma Damage | 08/17/2016 | Material request to evaluate Fiji plasma system for damage. | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details. | |
| ALD oxides in teos2 | 08/04/2016 | High quality oxides from teos2 required for devices, so contamination mitigation plan proposed to allow ALD films from Fiji1 to process in clean teos2. | Fiji 1 ALD (fiji1) | Approved. |
| Request for Cr2O3 target in AJA-Evap | 07/26/2016 | User to bring in own target for Cr2O3 deposition in AJA-Evap. |
AJA Evaporator (aja-evap), SVG Resist Coat Track 1 (svgcoat), Karl Suss MA-6 Contact Aligner (karlsuss) |
Approved. SNF Staff will take proper precautions during chamber clean to avoid inhalation of particles. |
| Request to add new module (SThM) to Veeco AFM | 07/20/2016 | Installation and management of new module for existing Veeco AFM. New thermal scanning capability will be available to any labmember. | Approved. | |
| Request to use DPI-3000 Polyimide | 07/19/2016 | Request to use DPI-3000 Polyimide in the SNF. | Approved. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for details. | |
| Request to move transfer station into nSiL glovebox | 06/29/2016 | Transfer station will be available for shared use. | Approved. |
