Hydrogen Anneal of Si Wafer after PT-DSE
PROM Request Title:
Hydrogen Anneal of Si Wafer after PT-DSE
PROM Request Summary:
Request to hydrogen anneal contaminated wafers in epi furnace.
PROM Date:
05/24/2017
PROM Decision:
Request approved to try H2 anneal in graphene furnace. Data collection showed graphene furnace is not viable option.
Link to PROM Request and supporting documentation:
Equipment List:
