Request for Cr2O3 target in AJA-Evap
PROM Request Title:
Request for Cr2O3 target in AJA-Evap
PROM Request Summary:
User to bring in own target for Cr2O3 deposition in AJA-Evap.
PROM Date:
07/26/2016
PROM Decision:
Approved. SNF Staff will take proper precautions during chamber clean to avoid inhalation of particles.
Link to PROM Request and supporting documentation:
