PROM Request Title: 
ITO Sputtering Target in Metallica
PROM Request Summary: 
Request to use ITO sputtering target in Metallica.
PROM Date: 
09/02/2015 (all day)
PROM Decision: 
Request approved. Recipes with O2 will require coordination of equipment modification with staff.
Link to PROM Request and supporting documentation: 
ITO Sputtering Target in Metallica