ITO Sputtering Target in Metallica
PROM Request Title:
ITO Sputtering Target in Metallica
PROM Request Summary:
Request to use ITO sputtering target in Metallica.
PROM Date:
09/02/2015
PROM Decision:
Request approved. Recipes with O2 will require coordination of equipment modification with staff.
Link to PROM Request and supporting documentation:
