Lampoly HBr/Cl2/O2 etching of silicon on lithium niobate
PROM Request Title:
Lampoly HBr/Cl2/O2 etching of silicon on lithium niobate
PROM Request Summary:
Request to etch Si on lithium niobate substrate. Contamination plan documented.
PROM Date:
03/30/2015
PROM Decision:
Request approved. Data to be reviewed by PROM committee.
Link to PROM Request and supporting documentation:
Equipment List:
