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Use of AZ Siloxane Negative Tone Resist

PROM Request Title: 
Use of AZ Siloxane Negative Tone Resist
PROM Request Summary: 
Request to use AZ Siloxane S06.106 negative tone resist.
PROM Date: 
04/14/2015
PROM Decision: 
Request approved. Bottle inventory for the group will be managed to 7 bottles. Please contact PROM Committee (snf-promcommittee at lists dot stanford dot edu) for more information.