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Use of Santovac5 for thermal contact in Plasma Etch (gold systems)

PROM Request Title: 
Use of Santovac5 for thermal contact in Plasma Etch (gold systems)
PROM Request Summary: 
Experiments performed to identify feasibility of Santovac5 for thermal contact in gold plasma etchers.
PROM Date: 
09/18/2013
PROM Decision: 
Recommendations for use included in PROM form.
Link to PROM Request and supporting documentation: 
Use of Santovac5 for thermal contact in Plasma Etch (gold systems)
Equipment List: 
MRC Reactive Ion Etcher (mrc)