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DuPont Polyimide FDLP C210 on headway2, Micromist coater, and Blue M Oven

PROM Request Title: 
DuPont Polyimide FDLP C210 on headway2, Micromist coater, and Blue M Oven
PROM Request Summary: 
New PI for use in the cleanroom.
PROM Date: 
03/11/2020
PROM Decision: 
Request approved. Please see process staff for details.
Equipment List: 
Oven BlueM 200°C to 430°C (bluem)
Headway Manual Resist Spinner (headway2)