This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Process flow for Perovskite materials including Pb nanoparticles, CsI and PbI | 08/09/2021 (all day) | Request for non-standard material processing in SNF Cleanroom | Request approved. Please see process staff for details. | |
| Use of SY-4000 in SNF Cleanroom | 07/30/2021 (all day) | Request to bring in personal color photoresist. | Request approved. Please see process staff for details. | |
| Using Dimethyl Sulfoxide for Liftoff | 07/30/2021 (all day) | Request to use alternative chemistry for liftoff in cleanroom | Request approved. Please see process staff for details. | |
| Use of SW-7001 in SNF Cleanroom | 07/30/2021 (all day) | Request to bring in personal color photoresist. | Request approved. Please see process staff for details. | |
| Gallium in Room 155 Sonicator | 07/22/2021 (all day) | Request to bring Ga into 155 and documentation of procedures for use with the sonicator. | Request approved. | |
| Cu-containing wafer processing on ccp-dep | 07/15/2021 (all day) | Request to modify contamination protocols to allow wafer processing on ccp-dep with minimal amounts of exposed Cu. | Request approved with additional precautions. Please see process staff for details. | |
| IP-n162 Resin for Nanoscribe | 07/13/2021 (all day) | Request for new personal resin to use with Nanoscribe. | Request approved. | |
| Process flow to go from savannah to thermconitride | 07/13/2021 (all day) | Request to go from flexible tool to clean tool. | Request approved with additional precautions. Please see process staff for details. | |
| SU-8 and shaker table use | 07/06/2021 (all day) | Request to bring in personal chemicals as well as personal shaker table. | Request approved. Please see process staff for details. | |
| Spin on dopant for creating p-n junctions in silicon | 07/06/2021 (all day) | Request for bringing in new chemicals and definining process flow | Request approved. |