This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| BCB use for wafer bonding and subsequent polishing | 12/13/2021 (all day) | Use of new bonding chemical in SNF. | Request approved. Etch restricted to Ox-RIE. | |
| Grinding, polishing, annealing, wet chemistry clean of Potassium Tantalate Crystals | 12/02/2021 (all day) | Use of non-standard materials on CMP gold contaminated equipment. | Request approved. | |
| Grinding, polishing, annealing, wet chemistry clean of Barium Titanate Crystals | 12/02/2021 (all day) | Use of non-standard materials on CMP gold contaminated equipment. | Request approved. | |
| Grinding, polishing, annealing, wet chemistry clean of Strontium Titanate Crystals | 12/02/2021 (all day) | Use of non-standard materials on CMP gold contaminated equipment. | Request approved. | |
| Request for processing of sealed silicon particles in SNF | 11/23/2021 (all day) | Request to bring loose nanomaterials into cleanroom inside sealed container and process in furnace. | Request approved. | |
| SOP- polyacrylonitrile nanoparticles in zetasizer | 11/19/2021 (all day) | SOP for Malvern use in Mavericks. | Request approved. | |
| Personal SU-8 2100 for use in SNF | 11/19/2021 (all day) | Request for personal SU-8 chemical. | Request approved. | |
| Low Termperature ALD process in MVD | 11/11/2021 (all day) | New process for MVD tool. | Request approved. Please see process staff for details. | |
| Use of MasterSilLO 971 in Mavericks | 11/08/2021 (all day) | New PDMS for use in Room 155 PDMS workbench | Request approved. | |
| Request for SnTe target in Lesker Sputter | 11/03/2021 (all day) | New target for use in SNF (ExFab) Lesker | Request approved. |