Grinding, polishing, annealing, wet chemistry clean of Strontium Titanate Crystals
PROM Request Title:
Grinding, polishing, annealing, wet chemistry clean of Strontium Titanate Crystals
PROM Request Summary:
Use of non-standard materials on CMP gold contaminated equipment.
PROM Date:
12/02/2021
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
