This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Nanoporous Glass Etching | 10/28/2021 (all day) | Process and chemicals request. | Request approved. | |
| Use of Omnicoat | 10/25/2021 (all day) | Personal chemical request for use in SNF. | Request approved. Please see process staff for details. | |
| Nickel wet etch off semi-clean silicon | 10/14/2021 (all day) | Process flow for semi-clean etch. | Request approved. Please see process staff for details. | |
| Nickel wetch etch off semi-clean silicon | 10/14/2021 (all day) | Process flow for semi-clean etch. | Request approved. Please see process staff for details. | |
| Silicon etching in existing SPTS uetch vapor etcher | 10/06/2021 (all day) | Request to modify uetcher equipment to enable si etching. | Request rejected due to equipment incompatibility with proposed process. | |
| Polymer Diffraction Gratings for Ashing and ALD | 09/30/2021 (all day) | Request for polymer use in SNF. | Request approved. Please see process staff for details. | |
| LOR and PMGI lift-off resists from Kayaku | 09/29/2021 (all day) | Request for personal chemicals for LOL. | Request approved. Please see process staff for details. | |
| Request to use APOL-LO 3200 Series Negative Lift-Off Photoresist | 09/23/2021 (all day) | New negative PR for personal use. | Request approved. | |
| BTO Process flow in SNF | 09/22/2021 (all day) | Documented SOP and Process Flow for BTO processing through multiple SNF tools. | Request approved. Please see process staff for details. | |
| SOG Processing in SNF | 09/22/2021 (all day) | Request for new personal SOG material. | Request approved. |