ProM Request archive
This is an archive of requests from 2013 to 2021. New requests are not being added here.
| PROM Request Title | PROM Date | PROM Request Summary | Equipment List | PROM Decision |
|---|---|---|---|---|
| Silicon etching in existing SPTS uetch vapor etcher | 10/06/2021 | Request to modify uetcher equipment to enable si etching. | Request rejected due to equipment incompatibility with proposed process. | |
| Polymer Diffraction Gratings for Ashing and ALD | 09/30/2021 | Request for polymer use in SNF. | Request approved. Please see process staff for details. | |
| LOR and PMGI lift-off resists from Kayaku | 09/29/2021 | Request for personal chemicals for LOL. | Request approved. Please see process staff for details. | |
| Request to use APOL-LO 3200 Series Negative Lift-Off Photoresist | 09/23/2021 | New negative PR for personal use. | Request approved. | |
| BTO Process flow in SNF | 09/22/2021 | Documented SOP and Process Flow for BTO processing through multiple SNF tools. | Request approved. Please see process staff for details. | |
| SOG Processing in SNF | 09/22/2021 | Request for new personal SOG material. | Request approved. | |
| SOP for PMMA analysis in Malvern DLS | 09/21/2021 | Documentation of procedure. | Request approved. | |
| Temperature based capacitive measurements for Hall Devices | 09/20/2021 | Bring in personal hot plate for use next to Hall Current measurement device in 159. | Request approved. | |
| SOP- PDMS with Carbon Black | 09/10/2021 | SOP for modified PDMS procedure in Mavericks 155. | Request approved. | |
| Use of Cyclotene 3022-46 in SNF | 09/03/2021 | Request for new chemical use in SNF. | Request approved. Please see process staff for details. |
