Silicon etching in existing SPTS uetch vapor etcher
PROM Request Title:
Silicon etching in existing SPTS uetch vapor etcher
PROM Request Summary:
Request to modify uetcher equipment to enable si etching.
PROM Date:
10/06/2021
PROM Decision:
Request rejected due to equipment incompatibility with proposed process.
Link to PROM Request and supporting documentation:
