Silane 5% in He (5% SiH4 in He)
Chemical Formula:
5% SiH4 in He
No equipment matches all of the filter criteria you have set above.
| Equipment name & NEMO ID | Cleanliness | Location | Material Thickness Range | Approved Materials supplied by Lab |
|---|---|---|---|---|
|
PlasmaTherm Shuttlelock PECVD System ccp-dep |
SNF Paul G Allen L107 Cleanroom |
100.00 Å -
4.00 μm
|