Chemical Formula:
PH3
| Equipment name & NEMO ID | Cleanliness | Location | Material Thickness Range | Approved Materials supplied by Lab |
|---|---|---|---|---|
|
AMAT Centurion Epitaxial System epi2 |
SNF Paul G Allen L107 Cleanroom |
50.00 Å -
3.00 μm
|
||
|
Tystar Bank 1 Tube 3 Poly B1T3 Flexible Poly |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|
||
|
Tystar Bank 1 Tube 4 LTO B1T4 Flexible LTO |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|
||
|
Tystar Bank 2 Tube 8 LTO B2T8 Clean LTO |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|
||
|
Tystar Bank 3 Tube 12 Poly B3T12 Clean Poly |
SNF Paul G Allen L107 Cleanroom |
25.00 Å -
2.00 μm
|