Phosphine (PH3)

Chemical Formula: 
PH3
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Deposition Equipment
Equipment name & NEMO ID Cleanliness Location Material Thickness Range Approved Materials supplied by Lab
AMAT Centurion Epitaxial System
epi2
SNF Paul G Allen L107 Cleanroom
50.00 Å - 3.00 μm
Tystar Bank 1 Tube 3 Poly
B1T3 Flexible Poly
SNF Paul G Allen L107 Cleanroom
25.00 Å - 2.00 μm
Tystar Bank 1 Tube 4 LTO
B1T4 Flexible LTO
SNF Paul G Allen L107 Cleanroom
25.00 Å - 2.00 μm
Tystar Bank 2 Tube 8 LTO
B2T8 Clean LTO
SNF Paul G Allen L107 Cleanroom
25.00 Å - 2.00 μm
Tystar Bank 3 Tube 12 Poly
B3T12 Clean Poly
SNF Paul G Allen L107 Cleanroom
25.00 Å - 2.00 μm