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Poly Si
Preferred Short Name:
Poly Silicon
Chemical Formula:
Si
Equipment Tabs
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
Tystar Bank 1 Tube 3 Poly
B1T3 Flexible Poly
Flexible
SNF Cleanroom Paul G Allen L107
25.00 Å
-
2.00 μm
Ge
Si
Si
SiGe
Tystar Bank 3 Tube 12 Poly
B3T12 Clean Poly
Clean
SNF Cleanroom Paul G Allen L107
25.00 Å
-
2.00 μm
Si
Si
