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Parylene

Chemical Formula:

poly(p-xylylene)

Equipment Tabs

Deposition Equipment

Deposition Equipment
Equipment name & Badger ID	Cleanliness	Location	Material Thickness Range	Approved Materials supplied by Lab
PDS 2010 LABCOTER™ 2 Parylene Deposition System parcoater	Flexible	SNF Exfab Paul G Allen 155 Mavericks		poly(p-xylylene)

Etching Equipment

Etch Equipment
Equipment name & Badger ID	Cleanliness	Location	Primary Materials Etched	Other Materials Etched
AMAT P5000 Etcher p5000etch	Clean Clean (Ge) Semiclean	SNF Cleanroom Paul G Allen L107	Si Si3N4 SiGe SiO₂ SiON	C C C dimethylpolysiloxane poly(p-xylylene) SiC Ti Various C-based W WSi₂ PI Resist Ti Tungsten
Technics Asher technics	Flexible	SNF Cleanroom Paul G Allen L107	Resist	dimethylpolysiloxane poly(p-xylylene) PI

Projects