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Polyimide

Preferred Short Name:

PI

Chemical Formula:

Polyimide

Equipment Tabs

Etching Equipment

Etch Equipment
Equipment name & Badger ID	Cleanliness	Location	Primary Materials Etched	Other Materials Etched
AMAT P5000 Etcher p5000etch	Clean Clean (Ge) Semiclean	SNF Cleanroom Paul G Allen L107	Si Si3N4 SiGe SiO₂ SiON	C C C dimethylpolysiloxane poly(p-xylylene) SiC Ti Various C-based W WSi₂ PI Resist Ti Tungsten
Gasonics Aura Asher gasonics	Clean Semiclean	SNF Cleanroom Paul G Allen L107	Resist	PI
Matrix Plasma Resist Strip matrix	Flexible	SNF Cleanroom Paul G Allen L107	Resist	PI
MRC Reactive Ion Etcher mrc	Flexible	SNF Cleanroom Paul G Allen L107	Metals Various Dielectrics	Metal oxides PI
Oxford Dielectric Etcher oxford-rie	Flexible	SNF Cleanroom Paul G Allen L107	Si3N4 SiC SiO₂ PI	C
Samco PC300 Plasma Etch System samco	Flexible	SNF Cleanroom Paul G Allen L107	Resist	dimethylpolysiloxane Si Si3N4 SiO₂ SiON Various polymers PI
Technics Asher technics	Flexible	SNF Cleanroom Paul G Allen L107	Resist	dimethylpolysiloxane poly(p-xylylene) PI

Projects