SPR 955 CM-.7 resist
| Equipment name & Badger ID | Training Required & Charges | Cleanliness | Location | Chemicals | Notes |
|---|---|---|---|---|---|
|
Headway Manual Resist Spinner headway2 |
Resist Coat (manual) Headway Manual Training 1.00 hours |
SNF Cleanroom Paul G Allen L107 |
|
Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists |
|
|
Laurell Manual Resist Spinner laurell-R |
Laurell Manual Resist Spinner Training 1.00 hours |
SNF Cleanroom Paul G Allen L107 |
SU-8, LOL, Ebeam resists allowed. No Acetone allowed. |
||
|
SVG Resist Coat Track 2 svgcoat2 |
SVG Resist Coat Tracks 1 and 2 Training 1.25 hours |
SNF Cleanroom Paul G Allen L107 |
|
Automatic HMDS, Resist spinning, and Bake. AZ5214IR Image Reversal. |
