Stepper |
ASML PAS 5500/60 i-line Stepper asml |
ASML PAS 5500/60 i-line stepper, automatic for 25 inch wafers, 450nm resolution, 365nm near-UV light
|
All |
SNF Cleanroom Paul G Allen L107 |
Contact Aligner |
EVG Contact Aligner evalign |
1:1 Contact Mask Aligner, 1.5 um resolution, single wafer, manual system
|
All |
SNF Cleanroom Paul G Allen L107 |
Direct Write |
Heidelberg MLA 150 heidelberg |
Maskless writer that patterns without prior fabrication of masks.
|
All |
SNF Exfab Paul G Allen 104 Stinson |
Direct Write |
Heidelberg MLA 150 - 2 heidelberg2 |
Maskless writer that patterns without prior fabrication of masks.
|
All |
SNF Cleanroom Paul G Allen L107 |
Contact Aligner |
Karl Suss MA-6 Contact Aligner karlsuss |
Karl Suss MA-6 Mask Aligner is a 1:1 Contact Aligner, 1.5 um resolution, single wafer, manual system (Backside align, including IR).
|
All |
SNF Cleanroom Paul G Allen L107 |
Contact Aligner |
Karl Suss MA-6 Contact Aligner karlsuss2 |
Karl Suss MA-6 Mask Aligner is a 1:1 Contact Aligner, 1.5 um resolution, single wafer, manual system (Backside align, including IR).
|
All |
SNF Cleanroom Paul G Allen L107 |